Completed: Micromachined based Multi-Sensing Solution toward Digitalisation of Foundation Industries

In collaboration with the Weir Group and the Materials Processing Institute

Industry 4.0 and Industrial Internet of Things (IIoT) are driven by the expanding development of smart sensors that offer new approaches to collect and post-process data to improve factory operation and digitalise production processes. Substantial technological investment is required to realise digitalisation, leading to expansion of the global industrial sensors market to USD 53.2 Billion by 2030 with a compound annual growth rate of 9.06%.

The response of a new micro-electromechanical system (MEMS) sensor, designed to detect simultaneously two different gases using two mechanically coupled resonators (a bridge and cantilever), was simulated. The novel sensor design was subsequently submitted for microfabrication. Although the desired MEMS did not arrive in time to be part of the current project, an alternative device was sourced from the Fraunhofer Institute for Silicon Technology (ISIT) to illustrate proof of concept and to understand its dynamic response and ability to absorb gas.

3D schematic of the multi-sensing scheme

Although the results were promising for sensing, an additional upgrade is required to achieve our targeted aim and we are currently investigating the capabilities of devices coated with metal-organic framework (MOF) for superior gas absorption and sensitivity. The project is continuing with internal funds and a new system will be tested once the novel sensor is characterised and validated in the lab using CO₂ and helium, followed by further trials at the Materials Processing Institute, UK laboratories.

Publications

A multi-sensing scheme based on nonlinear coupled micromachined resonators, https://doi.org/10.1007/s11071-023-08294-0
Triple sensing scheme based on nonlinear coupled micromachined resonators, https://doi.org/10.1007/s11071-023-08674-6